Ultralow-threshold erbium-implanted toroidal microlaser on silicon
نویسندگان
چکیده
We present an erbium-doped microlaser on silicon operating at a wavelength of 1.5 mm that operates at a launched pump threshold as low as 4.5 mW. The 40 mm diameter toroidal microresonator is made using a combination of erbium ion implantation, photolithography, wet and dry etching, and laser annealing, using a thermally grown SiO2 film on a Si substrate as a starting material. The microlaser, doped with an average Er concentration of 2310 cm, is pumped at 1480 nm using an evanescently coupled tapered optical fiber. Cavity quality factors as high as 3.9310 are achieved, corresponding to a modal loss of 0.007 dB/cm, and single-mode lasing is observed. © 2004 American Institute of Physics. @DOI: 10.1063/1.1646748#
منابع مشابه
On-chip green silica upconversion microlaser.
We demonstrate an erbium-doped silica toroidal microcavity upconversion laser on a silicon chip lasing in the visible spectral range (510-580 nm). The microcavity is pumped at 1458 nm by a tapered optical fiber coupled to the cavity and the lasing threshold is 690 muW. Lasing is observed at room temperature despite the high nonradiative relaxation rates of Er in pure silica that usually preclud...
متن کاملErbium-implanted high-Q silica toroidal microcavity laser on a silicon chip
Lasing from an erbium-doped high-Q silica toroidal microcavity coupled to a tapered optical fiber is demonstrated and analyzed. Average erbium ion concentrations were in the range 0.009–0.09 at. %, and a threshold power as low as 4.5 mW and an output lasing power as high as 39.4 mW are obtained from toroidal cavities with major diameters in the range 25–80 mm. Controlling lasing wavelength in a...
متن کاملUltra-low-threshold Er:Yb sol-gel microlaser on silicon.
Ultra-low threshold lasers which operate in the telecommunications band and which can be integrated with other CMOS compatible elements have numerous applications in satellite communications, biochemical detection and optical computing. To achieve sub-mW lasing thresholds, it is necessary to optimize both the gain medium and the pump method. One of the most promising methods is to use rare-eart...
متن کاملFabrication and characterization of erbium-doped toroidal microcavity lasers
Erbium-doped SiO2 toroidal microcavity lasers are fabricated on a Si substrate using a combination of optical lithography, etching, Er ion implantation, and CO2 laser reflow. Erbium is either preimplanted in the SiO2 base material or postimplanted into a fully fabricated microtoroid. Three-dimensional infrared confocal photoluminescence spectroscopy imaging is used to determine the spatial dist...
متن کاملThermal bistability-based method for real-time optimization of ultralow-threshold whispering gallery mode microlasers.
A method based on thermal bistability for ultralow-threshold microlaser optimization is demonstrated. When sweeping the pump laser frequency across a pump resonance, the dynamic thermal bistability slows down the power variation. The resulting line shape modification enables a real-time monitoring of the laser characteristic. We demonstrate this method for a functionalized microsphere exhibitin...
متن کامل